CS - DUV Field Service Engineer - Taichung

ASML

Taichung, Taiwan Posted October 28, 2026

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On-site Full-time Senior
Job Description

Introduction to the job

We are looking for a highly motivated Equipment Engineer to support ASML advanced lithography systems at customer sites. In this role, you will work closely with Customer Support Engineers to ensure optimal tool performance, minimize downtime, and continuously improve system reliability. The position requires flexibility to work in a 12-hour day/night shift rotation and operate in a fast-paced, high-tech semiconductor manufacturing environment.

Role and responsibilities

  • Provide on-site technical support for ASML equipment, ensuring system availability and performance meet customer expectations
  • Collaborate with Customer Support Engineers (CSE) to perform troubleshooting, diagnostics, and corrective maintenance
  • Execute preventive maintenance (PM) and system upgrades according to standard procedures
  • Analyze system issues and drive root cause analysis (RCA) with cross-functional teams
  • Monitor equipment performance and implement continuous improvement actions
  • Support installation, qualification, and ramp-up of new tools
  • Maintain accurate documentation of service activities and issue resolution reports
  • Ensure compliance with safety and quality standards at all times
  • Work in a 12-hour rotating shift (day/night), including weekends and holidays as required

Education and experience

  • Bachelor’s or Master’s degree in Electrical Engineering, Mechanical Engineering, Physics, or related technical field
  • 0–5 years of experience in semiconductor equipment, manufacturing, or relevant engineering roles
  • Experience in lithography, vacuum systems, optics, or precision equipment is a plus
  • Fresh graduates with strong technical background are encouraged to apply

Skills

  • Strong analytical and problem-solving skills with a hands-on approach
  • Ability to work under pressure in a cleanroom production environment
  • Good communication skills in English (spoken and written)
  • Team player with strong ownership and proactive mindset
  • Basic understanding of semiconductor processes and equipment is preferred
  • Willingness to work in shifts (12-hour day/night rotation)

Other information

  • Work location: Customer site (semiconductor fab environment)
  • Requires working in cleanroom conditions and complying with safety protocols
  • May require occasional domestic or international travel for training or support
  • On-the-job training will be provided

Inclusion and diversity

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that inclusion and diversity is a driving force in the success of our company.

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Required Skills
customer service manufacturing technical support collaboration troubleshooting preventive maintenance cross-functional collaboration process improvement compliance electrical engineering mechanical engineering problem solving stress resistance communication English
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